Bright beams of extreme ultraviolet (EUV) laser light with wavelengths in the range of 10-50 nm, are enabling the implementation of imaging, and patterning tools that can probe the nano-world on a table top.
In this talk I will review work by our group on the demonstration of imaging systems that have reached spatial resolutions down to 38 nm and can :
- image dynamics at the nanoscale using single-shot flash illumination, and
- image surfaces and inspect for defects in EUV Lithograph masks.
I will also describe a novel mass spectrometry microscope that exploits the interaction of extreme ultraviolet laser light and organic materials to map chemical composition in three dimensions with nanoscale resolution.